MEMS Arrayed Scanning Probes for Soft Nanolithography

نویسنده

  • S. Li
چکیده

In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A mould-and-transfer technology for fabricating scanning probe microscopy probes

We report a general fabrication technology for realizing singular or arrayed probes for scanning probe microscopy (SPM) applications. This method allows SPM probes to be made of a variety of materials, including metal, polymer (e.g., polyimide, SU-8), elastomer and silicon nitride. The probe shank and tip may be made of different materials. The mould-and-transfer fabrication process can realize...

متن کامل

Micromachined Arrayed Dip Pen Nanolithography Probes

We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing act...

متن کامل

Point-Mass Model for Nano-Patterning Using Dip-Pen Nanolithography (DPN)

Micro-cantilevers are frequently used as scanning probes and sensors in micro-electromechanical systems (MEMS). Usually micro-cantilever based sensors operate by detecting changes in cantilever vibration modes (e.g., bending or torsional vibration frequency) or surface stresses when a target analyte is adsorbed on the surface. The catalyst for chemical reactions (i.e., for a specific analyte) c...

متن کامل

Multifunctional probe array for nano patterning and imaging.

This letter reports the design, fabrication, and testing of a multifunctional scanning probe array for nanoscale imaging and patterning. The probe array consists of multiple cantilever probes, with each probe being able to perform a dedicated function such as scanning probe lithography (e.g., dip pen nanolithography and scanning probe contact printing) or scanning probe microscopy (e.g., atomic...

متن کامل

Harnessing catalysis to enhance scanning probe nanolithography.

The use of scanning probes bearing catalysts to perform surface nanolithography combines the exquisite spatial precision of scanning probe microscopy with the synthetic capabilities of (bio)chemical catalysis. The ability to use these probes to direct a variety of localised chemical reactions enables the generation of nanoscale features with a high degree of chemical complexity in a "direct-wri...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2006