MEMS Arrayed Scanning Probes for Soft Nanolithography
نویسنده
چکیده
In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and multifunctional scanning probe nanolithography. The probes have been used for high throughput direct write of thiol molecules.
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تاریخ انتشار 2006